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Engineering LibreTexts

24: Electromigration

  • Page ID
    31607
  • https://www.doitpoms.ac.uk/tlplib/

    Learning Objectives

    On completion of this TLP you should:

    • understand the process of electromigration
    • be aware of how damage is caused by electromigration and the ways in which such damage is minimized
    • know the reasons for changing from Al-based to Cu-based metallization.

    Before you start

    It would help to look through the Diffusion section within the Matter software, though the Diffusion TLP, but this TLP is mostly self-explanatory.

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