24: Electromigration
( \newcommand{\kernel}{\mathrm{null}\,}\)
https://www.doitpoms.ac.uk/tlplib/
Learning Objectives
On completion of this TLP you should:
- understand the process of electromigration
- be aware of how damage is caused by electromigration and the ways in which such damage is minimized
- know the reasons for changing from Al-based to Cu-based metallization.
Before you start
It would help to look through the Diffusion section within the Matter software, though the Diffusion TLP, but this TLP is mostly self-explanatory.